Plasma-induced processing for microfabrication of transparent materials using a Q-switched Nd:YAG laser

摘要

A laser-induced plasma in laser-material interaction due to the fact that it is in an extreme state of high-energy concentration is shown to be a powerful tool to perform drilling process to create micro channels in bulk quartz substrates under certain conditions. The plasma was induced by a Q-Switched Nd:YAG laser incident to a quartz substrate after pre-damaged by thermal-induced processing. The channels are of high quality with smooth kerf surface and the dimension of channels can be controlled from around 25 to 140 microns by a software program that interfaces with the laser system. A study of the dependence of drilling rate on the depth of channels provides a straightforward method for controlling the formation of plasma. The process technology, process characterization, and initial test results of the fabricated micro channels are presented in this paper.