Study on optimization of exposure energy distribution for fabrication of arbitrary 3-D microstructure by shaped beam using synchrotron radiation

摘要

Research on establishment of a fabrication method of three-dimensional microstructure which used SR (synchrotron radiation) light is reported. As the advantage of this method, since there is no necessity of fabrication masks and it is suitable for rapid prototyping, reduction of fabrication time and cost is mentioned. In this time, we carry out basic research about realization of this fabrication method, and it succeeded in fabrication of the free-form surface by exposure between pixels overlap. Moreover, in order to fabricate the three-dimensional structure of arbitrary shape, the algorithm which can determine exposure energy amount in consideration of overlap was written to target form. Using this algorithm, fabrication of various arbitrary three-dimensional structures was possible by only single aperture without manufacture a mask for every form. It is examining using this technique for fabrication of ¿-TAS or a reactor. The channel which has the inclination and free-form surface are fabricated by this method, improvement in functionality is promising.