Effect of different support structure on the characteristic of the grating light modulators

摘要

The energy method is applied in the analysis of the elastic coefficients of the crab-leg beam and the guided-end beam under the micro-nano-scale, the theoretical formula of the elastic coefficient is got. By considering the elastic coefficient caused by the residual stress and the edge effect of the capacitors, the static electrical and mechanical model of the grating light modulators is established. According to the static electrical and mechanical model and the actual design parameters, the pull-in voltage of the GLM with crab-leg beam is 7.2 V and the pull-in voltage of the GLM with guided-end beam is 9.5 V. The experimental system is built to test the performance of the grating light modulator. By using this experimental system, the pull-in voltage of the GLM with crab-leg beam is 7.6 V and the pull-in voltage of the GLM with guided-end beam is 10.2V.