Mechanical design and system-lever analysis of a novel micromirror array

摘要

A novel micromirror array based on PolyMUMPs fabrication process is proposed and explored. The segmented array described here, consisting of 37 hexagonal mirrors with diameter of 380um, is fabricated by MEMSCAP. A hierarchical design and optimization of the opto-mechano-electrical structure was carried out, combining finite element analysis (FEA) performed in Comsol Multiphysics with a system-level macromodelling in Matlab. The micromirror prototype uses design techniques able to provide a low pull-in voltage (less than 10V with all three electrodes biased and less than 14V with only one biased electrode) and large strokes (about 3um), as revealed from both FEA and system level simulation. Preliminary experimental test results show that the individual micromirrors can be actuated and orientated in space by applying voltages on their actuation electrodes. Following the individual micromirror cells tests, the entire array will be integrated in an adaptive microsystem for wavefront correction.