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Design and Characterization of a Gas Actuated Pump for μTAS

机译:μTAS气体驱动泵的设计与表征

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摘要

We present the results on the design, simulation, fabrication, and characterization of a gas-actuated micro-jet pump for integrated micro-fluidic systems. Vacuum suction mode provided by the pump can effectively decrease the formation of air bubbles and overcome the interface tension between the liquid and the solid wall in the micro-fluidic systems. Structurally the pump, which can be fabricated with only one etching step, consists of a nozzle, a diffuser, two suction tubes, a throat pipe, and a suction chamber. To optimize the parameters for the future designs, various pump configurations with different geometries were simulated through FLUENT software firstly. Then, the characteristics of the gas-actuated micro-jet pumps were studied experimentally. The pump began to work at a pressure of 2kPa, and the actuation pressure could be easily realized through a medical syringe.
机译:我们介绍了用于集成微流体系统的气动微喷射泵的设计,仿真,制造和表征的结果。泵提供的真空抽吸模式可有效减少气泡的形成,并克服微流系统中液体与固体壁之间的界面张力。从结构上讲,只能通过一个蚀刻步骤制造的泵由一个喷嘴,一个扩散器,两个吸管,一根喉管和一个吸气室组成。为了优化未来设计的参数,首先通过FLUENT软件模拟了具有不同几何形状的各种泵配置。然后,通过实验研究了气动微型喷射泵的特性。泵开始在2kPa的压力下工作,并且可以通过医用注射器轻松实现启动压力。

著录项

  • 来源
    《MEMS/NEMS technology and applications》|2009年|P.75100M.1-75100M.8|共8页
  • 会议地点 Shanghai(CN);Shanghai(CN)
  • 作者

    Xiuhan Lil; Xiaomei Yu;

  • 作者单位

    National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China, 100871 Beijing Jiaotong Univ. School of Electronics and Information Engineering, Beijing, China, 100044;

    National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China, 100871;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学仪器;
  • 关键词

    micro-jet pump; FLUENT; nozzle; diffuser; throat pipe;

    机译:微型喷射泵;流利;喷嘴;扩散器喉管;

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