首页> 外文会议>International Manufacturing Science and Engineering Conference >NUMERICAL STUDY ON TIP SHAPE OF NEAR-FIELD OPTICAL FIBER PROBE FOR DETECTING ELECTRIC FIELD INTENSITY OF WHISPERING GALLERY MODE RESONANCE
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NUMERICAL STUDY ON TIP SHAPE OF NEAR-FIELD OPTICAL FIBER PROBE FOR DETECTING ELECTRIC FIELD INTENSITY OF WHISPERING GALLERY MODE RESONANCE

机译:近场光纤探头尖端形状的数值研究,用于检测耳语画廊模式共振的电场强度

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For the measurement of micron-sized components, there are many methods widely used, such as by using CMM, and the size of the probe sphere of CMM is essential for measuring. In order to accurately measure the size of the probe sphere, a method by using Whispering Gallery Mode (WGM) resonance has been proposed. To measure the diameter of the microsphere with this method, the resonance wavelength and the angular mode number of WGM need to be known. The resonance wavelength can be measured by a wavelength meter and the angular mode number can be obtained by using the near-field optical fiber probe to measure the electric field intensity distribution on the surface of the microsphere. The detecting sensitivity of probe on electric field intensity is quite important for angular mode number measuring, which is deeply related to the accuracy of microsphere diameter measurement. In the process of electric field intensity detecting, the sensitivity of the probe can be affected by its shape. Therefore, the effect of probe tip shape on measurement was studied to optimize it. In this study, the effect of probe tip diameter, angle and shape on the measuring of electric field intensity on microsphere surface was investigated.
机译:为了测量微米尺寸组分,存在许多广泛使用的方法,例如通过使用CMM,CMM探针球体的尺寸对于测量至关重要。为了准确地测量探针球的尺寸,已经提出了通过使用窃窃廊模式(WGM)谐振的方法。为了测量该方法的微球的直径,需要知道共振波长和角度模式的WGM的数量。共振波长可以通过波长仪测量,并且可以通过使用近场光纤探针获得角度模式数来测量微球表面上的电场强度分布。检测探头对电场强度的灵敏度对于角度模式数量测量非常重要,这与微球直径测量的准确性深度有关。在电场强度检测的过程中,探针的灵敏度可能受其形状的影响。因此,研究了探针尖端形状对测量的影响以优化它。在该研究中,研究了探针尖端直径,角度和形状对微球表面电场强度测量的影响。

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