Dielectric barrier discharge (DBD) is simulated in three dimensions using the finite element based multiscale ionized gas (MIG) flow code. Two-species hydrodynamic plasma model coupled Poisson equation and Navier-Stokes equation are solved using MIG flow code to predict complicated flow structure inside a plasma induced micropump. The advantage of such micropump is rapid on/off switching without any moving parts. Results show reasonable distribution for ion and electron densities as well as an electric field. The key factors of design of plasma micropump are location of actuators and input voltage. The flow rate of plasma micropump is on the order of ml/min. Such flow rate may be beneficial for many applications from biological analysis to micropropulsion in space.
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