Silicon-nitride/Oxynitride wavelength demultiplexer and resonators for quantum photonics

摘要

SiO_xN_y shows promises for bright emitters of single photons. We successfully fabricated ultra-low-loss SiOxNy waveguide and AWG with low insertion loss ＜1dB and ＜3dB total loss (＜2dB on-chip loss and ＜1dB coupling loss) at 13 10nm.