High Speed Mach Zehnder Modulator with Low Series Resistance Phase Shifter Loaded in Traveling Wave Electrode

摘要

This research presents the design and characterization of the traveling wave Mach Zehnder modulator loaded L-shaped PN junction phase shifter at 72.8 Gbps data-rate. We propose a new structure of phase shifter with low series resistance meanwhile maintaining the FOM with low VπL (0.9 V-cm) and optical absorption.