On the discharge parameters of a glow mode DBD

摘要

In this paper we report on the behavior of a glow mode pulsed barrier discharge working at different gas pressure (25–760 Torr) in He and He+O2. The experimental set-up consists of a plane-parallel geometry of DBD system, excited by positive monopolar voltage pulses. The discharge properties were characterized by electrical measurements and emission spectroscopy. Our investigations showed that the discharge consists of two current pulses, with different polarities, corresponding to each voltage pulse. The main results referred to the effect of pressure and oxygen percentage on the discharge parameters. The temporally resolved spectroscopy of the DBD plasma working at different pressure pointed out the differences between the discharge mechanism at low pressure and that closed to atmospheric pressure. At low pressure (25 Torr), the oxygen atoms are efficiently created for about 2% of oxygen added to gas mixture.