High Resolution Actuators for Severe Environments

摘要

Stepping Piezo Actuators (SPA) are long stroke linear piezoelectric actuators able to perform long stroke (typ. >10mm) with an important resolution (typ. <1nm). Use of famous Amplified Piezo Actuator APA? gives the motor interesting characteristics, such as useful deformation mode and speed improvement, compared to standard inertial motors. The paper proposes experimental results obtained on various size of SPA. Speed aspects and max input current are considered as well as non-magnetic and thermal vacuum compatibilities.