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Accuracy Measurements of Miniature Robot Using Optical CMM

机译:使用光学CMM的微型机器人的准确度测量

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This paper describes accuracy measurement method for high resolution miniature robot manipulators. The robot itself, measuring method and the results are presented. Parallel kinematic robot structures have by now seen as the most promising, due to their simpler and stiffer structure and easier miniaturisation. A robot using the direct drive method and direct high resolution feedback has been studied. The accuracy measurement for such robot is not straightforward because of the sub micrometre accuracy requirements and robots incapability to carry any measurement object or sensor. New kind of method is presented in this paper. It bases on the use of non-touching optical Coordinate Measuring Machine (CMM). Main advantage of presented method is its capability to traceable measurements and minimal interference with the measured robot. Results show that presented method is suitable for the accuracy measurements of the miniature devices.
机译:本文介绍了高分辨率微型机器人操纵器的精度测量方法。呈现了机器人本身,测量方法和结果。由于其更简单和更富有的结构和更容易的小型化,并行运动机器人结构现在被视为最有希望的。已经研究了使用直接驱动方法和直接高分辨率反馈的机器人。由于子微米精度要求和机器人无法携带任何测量物体或传感器,因此这种机器人的精度测量并不直接。本文提出了新的方法。它基于使用非触摸光学坐标测量机(CMM)。呈现方法的主要优点是其能够可追溯​​测量和对测量机器人的干扰最小。结果表明,所提出的方法适用于微型设备的精度测量。

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