Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale

摘要

We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0.1 metre per second.