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PMJ 2015 Panel Discussion Overview 'EUV or 193i, who wins the center stage for 7nm node HVM in 2018?'

机译:PMJ 2015年小组讨论概述'EUV或193i,谁在2018年赢得了7nm节点HVM的中心阶段?“

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The PMJ1025 Panel Discussion set a goal to identify at the end of the discussion a single winner standing at center of the stage. But it turned out it was not so easy as either path you choose, 193i or EUV, there are big challenges in both directions. To summarize, EUV development is gaining momentum and to borrow words from Frank, "It's a question of when rather than if. One fact is also clear that it becomes exponentially harder to print patterns with 193i with each node of scaling. Time will come for sure when EUV is the clear winner standing at center of the stage, but as for N7 high volume production in 2018, we could not pick out a clear winner.
机译:PMJ1025小组讨论设定了一个目标,以识别讨论结束时,一个冠军站在舞台中心。但事实证明,随着您选择的路径,193i或EUV,两个方向都有很大的挑战。总而言之,EUV开发获得势头并从弗兰克借用单词,“这是一个问题而不是If。一个事实也明确说明它与193i的每个节点都有一个缩放的模式令人指重。时间会来当然,当EUV是舞台中心的明确获胜者时,但在2018年的N7高批量生产,我们无法挑选出明确的赢家。

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