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Novel Photosensitive Polyimide Precursor based on Polyisoimide using Amine Photo-generator

机译:基于聚异形酰亚胺的新型光敏聚酰亚胺前体使用胺光发电机

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A new amine photo-generator{[(4,5-dimethoxy-2-nitrobenzyl)oxyl carbonyl}-2,6-dimethyl piperidine (1) was prepared. Compound 1 was found to be effective for isomerization of polyisoimide (PII) to the corresponding polyimide (PI). The PII was prepared by the ring-opening polyaddition of oxydiphthalic anhydride (ODPA) and 3,3'-diaminodiphenylsulfone (3,3'-DDS), followed by treatment with trifluoroacetic anhy-dride-triethylamine (TEA) in N-methyl-2-pyrrolidone (NMP). The PH containing 10 wt% of 1 functioned as photosensitive resist, when it was postbaked at 150 °C for 5 min followed by development with cyclohexanone at 45 °C.
机译:制备新的胺光发电机{[(4,5-二甲氧基-2-硝基苄基)氧基羰基} -2,6-二甲基哌啶(1)。发现化合物1对相应的聚酰亚胺(PI)的聚异种酰亚胺(PII)异构化有效。通过催产性酸酐(ODPA)和3,3'-二氨基二苯基砜(3,3'-DDS)的开环聚酰胺制备PII,然后用N-甲基 - 的三氟乙酸酐 - 三乙胺(茶)处理 - 2-吡咯烷酮(NMP)。含有10wt%1的pH作为光敏抗蚀剂,当其在150℃下后烘干5分钟,然后在45℃下用环己酮发育。

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