Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test

摘要

In recent years, MEMS (microelectromechanical systems) devices are required to have high functionality and small size, especially for MEMS acceleration sensors, and sensitivity of a MEMS acceleration sensor is highly dependent on the Brownian noise. The Brown noise is known to be inversely proportional to mass of movable parts in the sensor, and the noise is lowered by increasing the mass, which implies a number of volume is needed to ensure high sensitivity. However, increasing size of the component is not preferable. Because of this, a design of gold-based MEMS acceleration sensor is proposed. The density of gold is 19.3 g/cm~3, and gold has high corrosion resistance and chemical stability. Most importantly, gold electrodeposition process can be easily integrated with current MEMS fabrication process.