Design and Fabrication of OTFT based Flexible Piezoelectric Sensor

摘要

Design and fabrication of Organic Thin Film Transistor (OTFT) based miniaturized piezoelectric sensor is presented in this investigation. The device is fabricated on flexible polyethylene naphthalate (PEN) film, using the small-molecule hydrocarbon pentacene as the semiconductor layer and solution-processed polyvinylphenol as the gate dielectric. Field effect mobility of the OTFT is greater than 0.01 cm2/Vs, Wloff current ratio greater than 105. The piezoelectric polymer, Polyvinylidene Fluoride (PVDF) is used as the sensor layer that is attached over the extended gate metal electrode of the OTFT. OTFT, which is in close proximity with sensor, serves as the amplifier to amplify the signal generated by piezoelectric sensor.