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Micro-mold fabrication using cellulose acetate

机译:使用醋酸纤维素的微模制造

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摘要

Polymer materials offer numerous advantages including flexible, low cost large area displays, lightweight, easy processing, good compatibility with a variety of substrates, and easy for structural modifications. Recently electro-active polymers (EAP) have been attractive due to their potential advantages including ease of processing and control, mechanical flexibility, and economical advantage. Recently electro-active paper (EAPap) was discovered as a smart material and as an actuating material with ionic and piezoelectric effects. Before cellulose acetate (CA) micro-pattern fabrication, solvent effect of micro or nano-pore formation was investigated. Since the micropore scatter the visible light, micropores give negative effect to apply optical device. The solvent mixture of acetone/dimethylacetamide (DMAc) created large amount of micro or nanopores. The resulting films were not transparent. However, volatile single solvent (acetone) did not form pores and gave transparent film. The various shapes of photoresist, such as circle and honeycomb patterns, were fabricated onto the silicon wafer to use as the mold. Cellulose acetate (CA) was poured to the mold and peeled off from the mold. The resulting pattern exhibited uniform size of the circle or honeycomb shape without defect.
机译:聚合物材料提供众多优点,包括柔性,低成本大面积显示器,轻巧,加工易于加工,良好的兼容性,易于结构修改。最近,电活性聚合物(EAP)由于其潜在的优势而具有吸引力,包括易于加工和控制,机械灵活性和经济优势。最近,被发现作为智能材料的电活性纸(EAPAP)和具有离子和压电效应的致动材料。在醋酸纤维素(CA)微观图案制造之前,研究了微观或纳米孔形成的溶剂效应。由于微孔散射可见光,因此微孔产生负面效果,施加光学装置。丙酮/二甲基乙酰胺(DMAC)的溶剂混合物产生大量的微观或纳米孔。所得薄膜不透明。然而,挥发性单溶剂(丙酮)没有形成孔并产生透明薄膜。将各种形状的光致抗蚀剂,例如圆和蜂窝图案,以用作模具的硅晶片。将醋酸纤维素(CA)倒入模具中并从模具中剥离。所得到的图案表现出圆形或蜂窝形状的均匀尺寸,而没有缺陷。

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