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Structure-property relationships of Au films electrodeposited on Ni

机译:镍耐力电沉积的结构 - 性质关系

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Thin gold films and coatings on metal have long constituted an important technology for the microelectronics industry and will continue to be important for microdevices such as contact springs. The properties of these materials may be highly processing dependent, particularly when the gold is deposited by electrochemical means. In this study, we characterize gold electrodeposited on Ni substrates from two bath chemistries: hard Au sulfite with proprietary hardening additive and soft Au cyanide. TEM and SEM show that the bath chemistry alters the microstructure and the resulting surface of the electrodeposits. Nanoindentation techniques were used to determine the elastic and plastic properties of the Au electrodeposits as a function of the specifics of processing. Soft Au electrodeposits have a grain size of on the order of 300 nm and a hardness of about 1 GPa. Hard Au electrodeposits produced from the sulfite bath feature grain sizes as small as 30 nm, some twinning, and fine porosity uniformly distributed both within the grains and at grain boundaries. The hardness is about 2 GPa, approaching the hardest values reported for sputtered gold films. The effect of the hardening agent on the microstructure of electrodeposits from the Au sulfite bath was also investigated and found to significantly refine the grain size at concentrations of at least 4 mL/L, although little additional refinement was found at higher concentrations.
机译:金属上的薄金薄膜和涂料长期以来一直构成了微电子工业的重要技术,并将继续对MicroDevice等Microdevice非常重要。这些材料的性质可以是高处理的,特别是当通过电化学手段沉积金时。在这项研究中,我们在两个浴化学中的Ni底物上表征了金电沉积:硬质亚硫酸盐,具有专有硬化添加剂和软Au氰化物。 TEM和SEM表明浴化学改变了电沉积物的微观结构和所得表面。用于确定Au电沉积物的弹性和塑性特性作为加工细节的函数。软AU电沉积物的晶粒尺寸约为300nm,硬度约为1gPa。从亚硫酸盐浴特征粒度生产的硬质Au电沉积小至30nm,一些孪生和均匀的细孔隙率均匀地分布在谷物内和晶粒边界内。硬度约为2GPa,接近溅射金膜报道的最难度的值。还研究了硬化剂对来自Au亚硫酸盐浴的电沉积物微结构的影响,发现并发现浓度为至少4ml / L的浓度下显着细化晶粒尺寸,尽管在较高浓度下较少额外的细化。

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