We demonstrate the facile fabrication of crack-free nanostructured crystalline titania into microsystems. Titania layers were formed by reacting Ti thin films, deposited by evaporation and sputtering, with aqueous H_2O_2. Cracks were observed in titania layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Nanostructured titania formed from sputtered and evaporated Ti films consists of aligned fibrous and sponge-like nanoporous morphologies, respectively. Rat fibroblasts L-cells cultured on these titania fibers remain viable up to 3 days. These observations demonstrate the feasibility of this technique to integrate nanostructured titania into NanolMicro-Electromechanical systems (NIMEMS) devices.
展开▼
