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Research on exposure mosaic of large-aperture holographic lens

机译:大孔径全息镜头曝光马赛克研究

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Compared with traditional refraction and reflection elements, diffractive imaging elements can be used as the primary mirror in large-aperture space telescope systems due to their low surface density and loose surface tolerances. At the same time, the expansion of the aperture of diffractive imaging elements has become an important development trend. In order to explore the manufacturing method of large-aperture diffractive imaging element. This paper proposes to use holographic lens as the diffractive mirror, and enlarge the aperture of holographic lens through exposure mosaic technology. By deflecting light path and rotating the substrate, the distribution position of the Gaussian beam center of the interference light field is changed, and the aperture of the holographic lens is increased through multiple exposures and developments. The effect of splicing errors on the imaging of the holographic lens is analyzed. In the scheme, the exposed and developed area is used as the alignment basis. The splicing error is judged according to the moire fringe formed by the light field and the developed area, the fringe acquisition and control system is used to collect the moire. The interferometer measured the phase error at the splicing area of the sample to be about 0.1λ,and the splicing error satisfies the imaging requirements of the holographic lens. The results show that the holographic splicing scheme is feasible and the splicing accuracy is high, which provides a solid theoretical foundation and technical support for multiple exposures to produce larger-diameter holographic lenses.
机译:与传统折射和反射元件相比,由于它们的低表面密度和松散的表面公差,衍射成像元件可以用作大孔径空间望远镜系统中的主镜。同时,衍射成像元素的孔径的扩展已成为重要的发展趋势。为了探索大孔径衍射成像元件的制造方法。本文提出使用全息镜片作为衍射镜,通过曝光镶嵌技术来扩大全息镜头的光圈。通过偏转光路并旋转基板,改变干涉光场的高斯光束中心的分布位置,并且通过多个曝光和开发增加全息镜片的孔径。分析了剪接误差对全息镜片成像的影响。在该方案中,暴露和开发区域用作对准。根据由光场和发达区域形成的莫尔条纹判断拼接误差,边缘采集和控制系统用于收集莫尔。干涉仪测量样品的拼接区域的相位误差为约0.1λ,拼接误差满足全息镜头的成像要求。结果表明,全息拼接方案是可行的,拼接精度高,为多个曝光提供了稳定的理论基础和技术支持,以产生更大直径的全息镜头。

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