Coaxial Aperture Arrays Produced by Ultrafast Direct Femtosecond Laser Processing with Spatially Multiplexed Cylindrical Vector Beams

摘要

Direct femtosecond laser printing was used to fabricate circular- and coaxial-shaped hole arrays at ultrafast printing rate up to 10~6 elements per second. To achieve such fast printing rate, we implemented a spatial multiplexing of either a single Gaussian or cylindrical vector beams into linear array of identical laser spots. Being compared to ordinary microholes, the coaxial openings arranged at the same periodicity demonstrate enhanced transmission in the mid-IR spectral range resulted from coupling between localized electromagnetic mode supported by coaxial unit cell and the lattice-type surface plasmon resonance. At optimized geometry of the coaxial openings and their arrangement we demonstrated resonant transmission as high as 92% at wavelengths ranging from 7.5 to 9 urn. This makes the coaxial microhole arrays with tailored spectral properties produced with ultrafast and inexpensive direct laser printing promising for sensing applications based on surface enhanced infrared absorption.