Study on Dynamic Simulation Technology of Polar Coordinates Wafer-handling Robot

摘要

Based on the analysis of the structure, function and transmission ways of polar coordinates wafer-handling robot, the radial liner stretching kinematics model of wafer-handling robot is established, and the kinematics character of the robot is analyzed, the kinematics equations of the robot is established. Finally, based on Microsoft Visual Studio 2008 and Pro/toolkit, the dynamic simulation of polar coordinates wafer-handling robot is realized.