Analysis of acceleration sensitivity in MEMS tuning fork gyroscope

摘要

This paper presents an analysis of acceleration output (sensitivity) in MEMS tuning fork gyroscopes (TFG) using simplified coupled resonators. We found that in TFG, applied acceleration in in-phase is transduced into excitation of anti-phase mode by unbalanced phase responses of the resonators. We proposed two mechanism and reduction methods; (1) coupling of the in- and anti-phase modes (frequency decoupling) and (2) energy dissipation from the anchors with different vibration systems and supporting structures. They were analyzed using FEM simulations and verified by experiments. Results showed that acceleration output decreased by one-tenth for decoupling ratio from 0.09 to 0.29.