An Silicon-based Integrated Ultraviolet light Visible light and Near- infrared light Hybrid Detector

摘要

This paper presents an silicon-based integrated hybrid detector that can perform the tasks of ultraviolet (UV) light detecting, visible (VIS) light detecting and near-infrared (NIR) light detecting. The detector is based on hybrid photodiodes that uses a vertical p+/N-well/Deep p-well/n-sub junction photodiodes which are available in CMOS processes, and can be configured to work as UV light detector, VIS light detector or NIR light detector in variable light environment by the using of transimpedance amplifier(TIA), subtractor(SUB), comparator and some simple switch logic gates. Device theory, structures, doping profiles and simulations are presented to verify the concept and feasibility. The simulation results show that the three photodiodes present different spectral responses, and dark current is as low as 10~(-14) A, and the optical signal of different wavelength can be effective detected with a high sensitivity and selectivity.