Performance Analysis of Non-spiral Planar Microcoils for Biomedical Electromagnetic Microactuators

摘要

This paper presents mathematical modelling and electrical characterization of non-spiral planar microcoils of circular and square geometries which find use in electromagnetic microactuators for biomedical devices. Non-spiral planar microcoils are advantageous over conventional spiral coils regarding fabrication easiness and heating losses. Circular and square coil geometries are compared through experimental analysis of coils' electrical parameters such as inductance, series resistance and parasitic capacitance. Comprehensive finite element analysis of the electromagnetic microactuator based on non-spiral planar microcoils is performed. The force outputs from the actuator are compared for circular and square coil geometries to reach an optimum actuator geometry which can generate sufficient force for microfluidic applications in biomedical engineering.