Effects of temperature and doping on aluminium doped ZnO thin film grown by spray pyrolysis

摘要

Owing to the low cost, nontoxicity and abundance, aluminium doped zinc oxide (AZO) thin films becomes a better alternative to transparent conducting oxides (TCO). Therefore, development of AZO films with transparent conducting properties is one of the main focuses of material scientists, and hence various methods have been attempted since the past two decades. Zinc oxide films with different Aluminium (Al) concentration are deposited on the large area (10×10cm) on glass substrate maintained at different substrate temperature by spray pyrolysis. Samples are characterized by XRD, UV-VIS transmittance, SEM and hall measurements. X-ray diffraction results show that films were polycrystalline in nature and the orientation changes with the increase in doping concentration. Carrier concentration, mobility and resistivity values were determined by measuring the hall measurement. The optical properties of the grown thin films were studied by taking the transmission spectra using UV-Visible spectrometer. Good correlations between structural and electrical properties were found and the influence of the substrate temperature and doping concentration on ZnO films was studied.