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Plasma source for auxiliary anode plasma generation in the electron source with grid plasma cathode

机译:用于栅极等离子体阴极的电子源中辅助阳极等离子体的等离子体源

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This paper presents an auxiliary source of anode plasma developed for the electron source with a plasma cathode based on a low-pressure arc discharge. The plasma source consists of three cells: the main ion-plasma system with closed electron drift and two auxiliary ones. The latter include a hollow cathode and a reflective discharge cell. The construction allows to generate and transport a submillisecond low-energy beam up to 25 keV with a diameter of 40 mm in axial magnetic field up to 80 mT. In the main mode of the auxiliary discharge, the anode plasma is created at a current of up to 15 A and with discharge voltage about 300 V. Using the source of auxiliary anode plasma allows you to expand the range of operating pressures of the electron source down to 3.6×10~(-3) Pa of argon and get rid of high-frequency beam current oscillations when operating at low pressure (up to 1.2×10~(-2) Pa).
机译:本文介绍了基于低压电弧放电的等离子体阴极为电子源开发的阳极等离子体的辅助源。 等离子体源由三个细胞组成:具有闭合电子漂移和两个辅助的主要离子等离子体系统。 后者包括中空阴极和反射放电电池。 该结构允许在轴向磁场中产生高达25keV的亚倍二十次低能量光束,直径为40毫米,高达80毫升。 在辅助放电的主模式中,在最多15A的电流下产生阳极等离子体,并且通过辅助阳极等离子体的源极源源源源自源自电源。允许您扩展电子源的操作压力范围 低至3.6×10〜(3)PA的氩气,并在低压工作时摆脱高频束电流振荡(高达1.2×10〜(2)PA)。

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