Development and Research of MEMS

摘要

Microelectromechanical system (MEMS) is a new multi-disciplinary research field in recent years, which is an actuator or system composed of micro sensors, micro actuators, micro devices, signal processing system and control system. This paper mainly introduces the development of MEMS, technology characteristics, main processing materials and processing technology. At last it introduces the development and application of MEMS in the fuze system and aerospace system in detail for the future.