Comparison of TiO_2 Active Area of Gas Sensors Enhanced by Annealing and RIE Etching

摘要

In this article we deal with enhancement of nano structured polycrystalline titanium dioxide surfaces deposited on insulating SiO_2 layers, that can be implemented into sensoric structures for detection of gases. We take advantage of the change in conductivity of thin TiO_2 layer after gas exposure as the basic principle of gas detection. We try to increase and enhance the active area of the TiO_2 surface by its annealing and by controlled ICP RIE etching through a resist mask.