Synthesis of titania or titanium dioxide (TiO_2) is attracted to energy and environmental applications. Here, the growth of nanostructure TiO_2 nanowires on Si (100) substrates by using the two-step method. Different seed layers of TiO_2 were deposited by spin coating and annealing, followed by the growth of TiO_2 nanowires by using the hydrothermal method. The sol-gel technique was used in preparing the TiO_2 solution for the thin film deposition purpose. Acetic acid, hydrochloric acid and tris (2-aminoethyl) amine were used as a stabilizer to synthesize three different TiO_2 seed layers. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and structure of the thin film and TiO_2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).
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