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Frequency-measurement-setup for semiconductive layers

机译:用于半导体层的频率测量设置

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The aim of this work is to measure the parameters of the semiconductive layers over a broad frequency range (300 kHz to 500 MHz). These parameters depend on moisture, temperature and pressure on the semiconductive layers during the measurement. The measuring results are presented as complex permittivity. The focus of the work is to present measuring methodology, sample preparation, calibration and possible sources of errors while determining the parameters. The presented investigations involve new, improved carbon black materials and compounds. The measuring setup enables measurement of the permittivity over a broad frequency range, at different temperatures and pressures as well as at variable moisture rates. The proposed measurement setup is verified by a commercial material measuring device.
机译:这项工作的目的是测量在宽频率范围内(300kHz至500MHz)的半导体层的参数。这些参数依赖于测量期间半导体层上的水分,温度和压力。测量结果显示为复杂介电常数。在确定参数时,工作的重点是呈现测量方法,样品准备,校准和可能的误差源。所提出的研究涉及新的,改善的炭黑材料和化合物。测量设置能够在不同温度和压力以及可变水分速率下测量宽频频率范围内的介电常数。所提出的测量设置由商业材料测量装置验证。

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