首页> 外文会议>International Symposium on Ultrasound in the Control of Industrial Processes >Characterization of the state of a droplet at a micro-textured silicon wafer using a finite difference time-domain (FDTD) modeling method
【24h】

Characterization of the state of a droplet at a micro-textured silicon wafer using a finite difference time-domain (FDTD) modeling method

机译:使用有限差分时间域(FDTD)建模方法表征微纹理硅晶片的液滴状态

获取原文

摘要

In this study, we introduce a finite difference time domain method to study the propagation and reflection of an acoustic wave on smooth and micro-textured silicon surfaces in interaction with droplets in different states. This will enable numerical investigations of interfaces composed of periodically distributed well-defined pillars. One type of transducer was modeled generating longitudinal wave. Three configurations were studied: the Cassie state, the Wenzel state and a composite state for which the droplet collapsed into the middle height of the pillars. After analysis of the displacement along y direction in the silicon wafer, we were able to show that a longitudinal wave is sensitive to the detection of the state of the droplet. The first experimental results made it possible to show a good agreement between modeling and experiments.
机译:在这项研究中,我们介绍了有限差分时域方法,研究了与不同状态的液滴相互作用的光滑和微织地硅表面上的声波的传播和反射。这将使由周期性分布良好的柱子组成的接口的数值调查。一种类型的换能器被建模产生纵波。研究了三种配置:Cassie状态,温革状态和液滴塌陷到柱的中高的复合状态。在硅晶片中沿Y方向分析位移之后,我们能够表明纵向波对液滴状态的检测敏感。第一个实验结果使得建模和实验之间具有良好的一致性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号