Parallel Measurement Based on Laue Effect

摘要

In the paper, interference measurement method for end surface parallel measurement of transparent materials is described. Firstly, basic principles of optical plane template equilibrium point detection are analyzed, measurement algorithms and formulas for calculating optical parallelism are proposed, then possible error of algorithm is analyzed in details, concrete plan for correcting the error is proposed, overall method for testing parallelism is proposed on the basis, and finally related experiment is designed for testing and analyzing the method. Test results show that the method can prominently improve precision of testing parallelism with excellent testing effect.