Antidot arrays of FePd L1_0 alloy with high out-of-plane magnetization component have been fabricated by deposition of Fe/Pd multilayers on the anodic aluminum oxide templates and their successive annealing at temperatures 450 °C and 530 °C. X-ray diffractometry proved formation of L1_0 structure after sample annealing at 530 °C. Magnetometry, magnetic force microscopy and scanning electron microscopy reveal that the enhancement of out-of-plane magnetization component is associated with complex distribution of magnetic moments orientation in FePd films deposited on the templates with a developed surface topography.
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