Piezoelectric acoustic pressure sensor diaphragm design for energy harvesting

摘要

In this paper we present the effects of diaphragm design parameters on the efficiency of acoustic pressure sensor for energy harvesting. We have considered different design parameters of the diaphragm such as shape, dimensions, thickness, type of the piezoelectric material of the diaphragm. We studied the effect of changes in these parameters on the deflection, stress, strain, voltage generated and resonant frequency of the diaphragm which affect the efficiency of energy harvesting. The effect of the changes in these parameters on energy harvesting has been simulated and analyzed using Comsol Multiphysics tool.