Structure and Control on FSM Subsystem in Precision Tracking

摘要

According to the characteristics of Fast Speed Mirror, the paper discusses that, in a FSM composite axis control system, the mechanism of the servo control, the main system performance, the speed loop of subsystem and effects of automatic zero locking system. Combined with traditional methods, a new structure of axial subsystem is proposed, to improve the rapid high-precision tracking technique. From theory to experimental model, the paper made a detailed analysis.