DESIGN AND FABRICATION OF A WAVELENGTH-TUNABLE SILICON PHOTONIC MICRO-RING RESONATOR CONSISTING OF OPTICAL WAVEGUIDE COUPLER

摘要

We present design and fabrication of a wavelength-tunable silicon-on-insulator microring resonator. The micro-ring is composed of two fixed and movable U-shaped waveguides coupled with each other through two directional couplers. The initial round-trip length of micro-ring is 19.1 μm, which can be modulated 10.5 % by an electrostatic comb actuator. The free spectral range of the micro-ring resonator is 20 nm at the optical communication wavelength of 1.55 μm. The device was fabricated by electron-beam lithography and fast atom beam etching. The hydrogen thermal process was also carried out to smooth the surface of waveguides, which results in reducing the propagation loss in the micro-ring resonator.