Particle Tolerance of micro diaphragm pumps with low chamber heights and passive flap valves

摘要

The particle tolerance of micro diaphragm pumps with low pump chamber heights and passive flap valves has been investigated. The paper describes five failure mechanisms caused by different particle types in three locations of the pump. Analytical models have been selected and evaluated to understand the geometric path through the pump and to facilitate the design of the pump's particle tolerance. Furthermore, the criticality of different failure mechanisms has been assessed. The results are the basis for an appropriate filter design and the adjustment of micropump particle tolerance to achieve reliable long-term operation.