Calibration of measurement system based on phase measurement profilometry

摘要

With the phase measurement profilometry widely used, the precision phase measurement profilometry is demanded. The system was calibrated using by translating the calibration plate. Relationship between the coordinate z and phase was determined. And the coordinates (x, y, z) and pixel coordinates (m, n) relationships were determined too. We analyzed the results of each step of the standard deviation of calibration and get a high calibration accuracy. In order to further improve the calibration accuracy, we corrected the angle errors between the camera coordinate system and the actual world coordinate system. In order to verify the validity of this calibration method, we measured a ball bearing. The measurement accuracy is 0.0428+/−0.01mm.