Ultra accuracy parallel electronic datum optical metrology System of systems

摘要

Optical Metrology and Range Measurement, Coordinates Measuring System are one of the important bases of the modern manufacturing industry precise manufacture. In order to obtain more new measurement technology that a higher degree of intelligence, lower cost, operation more easily, all of us had undertaken extensive research. However, in the traditional measurement techniques, there are still not enough level of intelligent and complicated to operate, and other shortcomings. This paper generously provided an ultra accuracy parallel electronic datum optical metrology system of interconnected systems for manufacturing measurement and processing monitoring, etc. The method of the electronic parallel datum is to calculate by a stereo angle between the two beams of light with inclination simulating parameters of an object and successfully replace the 6-DOF mechanical datum of the related work piece by being pre-set in the demanding related work piece and system. Furthermore, it is the intelligent direct reading of 6-DOF mechanical datum and parameter storage function of the technique, and greatly improve the benefit performance of the nifty system and at the same time offer the available process control method and can be used for all manufacturing industrial, including the micro-fabrication and micro-manufacturing, etc. It can be used for ultra accuracy manufacturing environment, because the diameter of the laser beam can reach 100 nm and ion beam diameter even reached the extreme limit accuracy of 2nm. We use micro-staggered approach to vastly improve the accuracy of interconnected system. It means that the old Electronic Parallel Datum receiver has the tidiness arrangement and alignment in dot matrices upper and lower. The micro-staggered spacing is 2nm and beyond.