首页> 外文会议>Conference on Integrated Optics: Devices, Materials, and Technologies XXIII >Mid-infrared integrated wideband dual-polarization Fourier- Transform spectrometer
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Mid-infrared integrated wideband dual-polarization Fourier- Transform spectrometer

机译:中红外集成宽带双极化傅立叶变换光谱仪

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Due to their unique vibrational/rotational frequencies in the mid infrared (MIR) fingerprint region, which scans from 500to 1500 cm~(-1), molecules can be assuredly identified and quantified. Thus, integrated on-chip mid infrared spectroscopicsystems, with low power consumption and high performance, would show great value for numerous applications, such asmedical diagnosis, astronomy, chemical and biological sensing or security. Different solutions can be envisioned, such asFourier-Transform spectrometers, echelle gratings, or arrayed waveguide gratings (AWG). The integrated spatialheterodyne Fourier-Transform spectrometer (SHFTS) shows relaxed fabrication tolerances while applying a phase andamplitude correction algorithm. Meanwhile, it provides high optical throughput and high spectral resolution comparedwith AWG or echelle gratings. However, up to now in the literature, most of the reported integrated Fourier-Transformbased spectrometer is based on silicon-on-insulator operating in the near infrared typically at 1.55 μm wavelength.Thereby the development of integrated Fourier-Transform spectrometers operating in the MIR covering the widefingerprint region is highly desirable. In this work, we experimentally demonstrate the first duel polarization SHFTSoperating in the mid infrared beyond 5 μm wavelength. The fabricated FTS, which is based on the graded-index Ge-richSiGe platform, contains 19 Mach-Zehnder interferometers with a linearly increasing path difference. A spectralresolution better than 15 cm~(-1) has been demonstrated within an unprecedented spectral range of 800 cm~(-1) (from 5 to 8.5μm wavelength).
机译:由于中红外线(MIR)指纹区域的独特振动/旋转频率,从500扫描对于1500cm〜(-1),可以肯定鉴定和量化分子。因此,集成在芯片中红外线光谱具有低功耗和高性能的系统将为许多应用显示出很大的价值,例如医学诊断,天文学,化学和生物传感或安全。可以设想不同的解决方案,例如傅立叶变换光谱仪,梯定光栅或排列波导光栅(AWG)。综合空间外差傅立叶变换光谱仪(SHFT)在施加相位和施加相位的同时显示出宽松的制造公差幅度校正算法。同时,它提供了高光吞吐量和高光谱分辨率用AWG或echelle光栅。但是,到目前为止在文献中,大多数报告的综合傅立叶变换基于光谱仪基于在近红外线操作的绝缘体,通常在1.55μm波长下。因此,在MIR中运行的集成傅里叶变换光谱仪的开发覆盖范围指纹区域是非常理想的。在这项工作中,我们通过实验展示了第一个决斗极化SHFTS在超过5μm波长超过5μm的中红外线操作。制造的FTS,基于富分数Ge RichSiGe平台,包含19个Mach-Zehnder干涉仪,具有线性增加的路径差异。谱在800cm〜(-1)的前所未有的光谱范围内,已经证明了优于15cm〜(-1)的分辨率(从5到8.5μm波长)。

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