High-voltage Photonic Switching of Dielectric Elastomers with Amorphous Silicon Thin-Films

摘要

Optically-switched composite materials based on semiconducting materials have the potential to simplify the circuitryrequired to control artificial muscles. This contactless control method has the potential to improve visual technologies byenabling controllable haptic and morphing interfaces. Optically-switched active displays could provide enhanced userinteraction, especially for those with visual impairments. Research into morphing interfaces with dielectric elastomeractuators (DEAs) centralizes on segmented electrode architectures that can achieve large active strains in multipledegrees of freedom. However, controlling the activation of multiple electrodes typically requires an array of discreterigid components (e.g. MOSFETs) as well as the separation of high-voltage power lines and low-voltage control signals.In this work, we develop a photo-switched DEA system that removes the need for wired control signals, reducingcomplexity. Photonic switching of DEA electrodes is achieved by exploiting the light-dependent resistance of a thinfilm of deposited amorphous silicon (a-Si). Samples with layer thicknesses of 0.84 μm have been fabricated usingplasma enhanced chemical vapor deposition. Breakdown voltages of above 6kV were obtained when using a nonconductingsubstrate (glass). Preliminary testing of the system shows that voltage swings of up to 865V can be achievedbetween ambient and direct illumination, producing an out of plane actuation of 2 μm in a weight-biased DEA discactuator. Further tuning of the electric circuit should lead to larger actuation strains. Future work will focus on thecontrol of multiple DEA electrodes using localized light patterns as well as testing and characterizing other materials toimprove the voltage swing across the DEA.