Laser Induced Breakdown Spectroscopy (LIBS) technique has been applied to study the annealing effect of Al-Ge alloy at 150, 175, 240, 280, 325 °C. LIBS spectra of all samples prepared at these annealing temperatures were recorded. The signal intensity of the Al and Ge spectral lines increases with increase in annealing temperature. This increase in the signal intensity is due to structural modification of Al-Ge sheets surface with annealing temperatures. This variation in intensity verifies the assessment of annealed materials which can be performed with LIBS technique.
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