Our studies have shown the possibility of using the thermal synthesis method from Zn vapors to obtain ZnO nanorods arrays as a sensitive element for UV radiation SAW sensors. The piezoelectric properties of the LiNbO_3 substrate typically degrade upon nanorods growth at elevated temperature. This limitation is solved by using additional annealing of prepared structure at 550 °C in an oxygen atmosphere. The obtained ZnO NRs were investigated by scanning electron microscopy and photoluminescence.
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