DETERMINATION OF MECHANICAL PROPERTIES OF DIFFERENT SIZED SILICON AND SILICA NANOWIRES TESTED IN SEM

摘要

To push miniaturization in electronics forward, integration of silicon or silica nanowires into microelectromechanical based sensors (MEMS) becomes essential, because they were found to enhance the overall sensitivity and noise immunity. With respect to mechanical stress may develop in nanowires in operation of the MEMS system, their stability need to be checked to ensure long-term reliability.