IN SITU MICROMECHANICAL TESTING INSIDE THE SCANNING ELECTRON MICROSCOPE AT SUBAMBIENT TEMPERATURES

摘要

In material science, the measurement of mechanical material properties as a function of temperature is of great interest, as it allows determining the activation parameters of the underlying deformation mechanism. In the case of nanostructured materials or MEMS devices, it is interesting to probe local properties by means of micromechanical experiments. However, in the case of nanograined metals, testing at elevated temperatures is not possible due to heat induced grain growth and thus changes in the microstructure during testing.