Composite rubber electret for electromechanical load detection

摘要

This study has demonstrated the design and fabrication of stretchable polydimethylsiloxane (PDMS) rubber electrets. Features of the proposed device: (1) implemented using the casting and stacking of multi-layer rubbers, (2) each rubber layer consists of patterned microstructures to control the piezoelectricity of composite films. Fabrication processes include the surface coating of PTFE, sputtering of elastic gold electrodes, and micro-plasma discharges to produce functions as electrets. In application, the fabricated rubber electret shows a strong piezoelectricity (d33) of ～1500 pC/N, and the lower elastic modulus (E) of ～300 kPa. Moreover, experiments also demonstrate applications of composite rubber films for acoustic pressure detections.