High-damped accelerometer based on squeeze-film damping and piezoresistive nanogauge detection for vibrating environments

摘要

This paper reports the conception, the fabrication and the electrical testing of an overdamped silicon accelerometer dedicated to vibrating environments. Squeeze-film damping effects are implemented to drastically reduce the mechanical component bandwidth while keeping a satisfactory resolution. Mechanical filtering of vibrations above 3 Hz is expected to strongly lower the mechanical overcharge and the fatigue of the structure that may occur when the MEMS is exposed to large parasitic vibrations and shocks. Such a low-pass system has not been reported yet, to the best of our knowledge.