Characteristics of double planar thin film inductor with Ni-based magnetic film for DC/DC integration

摘要

This paper mainly describes the design, fabrication and test of double planar thin film inductor. The thin film inductor has a sandwich structure, which consists of a double-square spiral planar Cu coil between top and bottom Ni magnetic thin films on a glass substrate; it is fabricated by dry and wet processes. The inductor is 2.7 × 1.9 mm~2 in area, which is suitable for a MHz switching DC - DC converter integration. The finally measurement shows that inductance of 0.71uH constant up to 1.5MHz, and a quality factor of 1.09 at 1.5 MHz.